Broschiertes Buch

Sensor Technology in the Netherlands: State of the Art

Proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2-3 March 1998

Herausgegeben: Berg, Albert van den; Bergveld, Piet
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In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electronics, allowed for new transduction principles, and enabled the realization of micromechanical structures...