Sensitivity Analysis for Grating Reconstruction
Nico van der Aa
Broschiertes Buch

Sensitivity Analysis for Grating Reconstruction

Finding Analytical Field Amplitude Derivatives by Using RCWA

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Periodic structures, called diffraction gratings, play an important role in optical lithography. When the incident field and the shape of a grating is known, the diffracted field can be computed by using the rigorous coupled-wave analysis (RCWA) or the C method. These so-called forward models solve Maxwell's equations for time-harmonic fields by transforming them into algebraic eigensystems.The reconstruction of a grating shape starts with an initial guess of its shape. The diffracted field is computed with the forward model and compared to actual measurements. The difference between them dete...