Scanning Capacitance Microscopy
Wolfgang Brezna
Broschiertes Buch

Scanning Capacitance Microscopy

and Spectroscopy on Semiconductor Materials

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In this PhD-thesis, Scanning Capacitance Microscopy (SCM) and Scanning Capacitance Spectroscopy (SCS) was applied to investigate various silicon samples. SCM is used to investigate the electrical behaviour of samples with a lateral resolution below 100 nm. The work is divided into 3 major experimental parts: (1) the properties of metal organic chemical vapour deposited zirconium dioxide as dielectric material for SCM was explored. Usage of zirconium dioxide leads to reduced leakage currents and improved signal quality. (2) focussed ion beam induced damage in silicon was investigated with SCM. ...