Preparation and Characterization of Sputtered Molybdenum Oxide Films

Preparation and Characterization of Sputtered Molybdenum Oxide Films

for Sensor Applications

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Molybdenum oxide (MoO3) is a material finds potential applications due to its abundance and attractive properties such as catalyst, gas sensing and electrochromism. MoO3 thin films exist in three phases namely: orthorhombic - phase, monoclinic beta- phase and hexagonal phase. The crystal structure of beta- MoO3 in which MoO6+ octahedral form a three dimensional network by sharing the corners with each other and well suited as a catalyst for number of chemical reactions. Recently, nanocrystalline oxide films attracted much for their promising applications in building of nanodevices and nanosens...