Plasma Processing of Semiconductors
P.F. Williams (Hrsg.)
Gebundenes Buch

Plasma Processing of Semiconductors

Versandkostenfrei!
Versandfertig in 1-2 Wochen
231,99 €
inkl. MwSt.
PAYBACK Punkte
116 °P sammeln!
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.