Patterning and Characterization of Carbon Nanotubes Grown in a Microwave Plasma Enhanced Chemical Vapor Deposition Chamber
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This research studies the growth of carbon nanotubes from a nickel catalyst to be used on a eld emission device. A triode structure was created to be able to patterned the CNTs to improve the emission of electrons. Studies are performed on the e ects of hydrogen pretreatment on nickel catalyst of di erent thicknesses and deposition methods on a silicon substrate and how it will a ect the growth of carbon nanotubes using microwave plasma enhanced chemical vapor deposition. The treated catalyst granule size and density was determined optically through scanning electron microscope images and atom...
This research studies the growth of carbon nanotubes from a nickel catalyst to be used on a eld emission device. A triode structure was created to be able to patterned the CNTs to improve the emission of electrons. Studies are performed on the e ects of hydrogen pretreatment on nickel catalyst of di erent thicknesses and deposition methods on a silicon substrate and how it will a ect the growth of carbon nanotubes using microwave plasma enhanced chemical vapor deposition. The treated catalyst granule size and density was determined optically through scanning electron microscope images and atomic force microscope measurements. It was discovered that sputtered catalyst needs a longer pretreatment than evaporated catalyst. As expected, the pretreatment time must be increased as the catalyst thickness increases to get granule sizes and densities favorable for carbon nanotube growth. We also established the size of the catalyst granules correlated to the diameter of the multi walled CNTs grown. We determined the catalyst can be over treated causing catalyst conglomeration that result in poor CNT growth. The CNTs diameter was determined optically through scanning electron microscope images. This work has been selected by scholars as being culturally important, and is part of the knowledge base of civilization as we know it. This work was reproduced from the original artifact, and remains as true to the original work as possible. Therefore, you will see the original copyright references, library stamps (as most of these works have been housed in our most important libraries around the world), and other notations in the work. This work is in the public domain in the United States of America, and possibly other nations. Within the United States, you may freely copy and distribute this work, as no entity (individual or corporate) has a copyright on the body of the work. As a reproduction of a historical artifact, this work may contain missing or blurred pages, poor pictures, errant marks, etc. Scholars believe, and we concur, that this work is important enough to be preserved, reproduced, and made generally available to the public. We appreciate your support of the preservation process, and thank you for being an important part of keeping this knowledge alive and relevant.
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