Optical Investigation of Transition Metal Implanted Wide Band Gap Semiconductors
Brian P. Feller
Broschiertes Buch

Optical Investigation of Transition Metal Implanted Wide Band Gap Semiconductors

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Thin films of GaN, Al0.1Ga0.9N, and ZnO were implanted with Cr, Mn, and nickel Ni to produce dilute magnetic semiconductors. Optical and magnetic techniques were used to evaluate crystal structure restoration and coercive field strength as a function of implant species and annealing temperature. Maximum crystal restoration was obtained for Al0.1Ga0.9N after annealing at 675 oC; for Cr implanted p-GaN after annealing at 750 oC; for Mn or Ni implanted p-GaN after annealing at 675 oC; for Cr implanted ZnO after annealing at 700 oC; for Mn implanted ZnO after annealing at 675 oC; and for Ni implan...