On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems
Robert Kirchner
Broschiertes Buch

On UV-Nanoimprint-Lithography as Direct Patterning Tool for Polymeric Microsystems

Versandkostenfrei!
Versandfertig in 1-2 Wochen
39,80 €
inkl. MwSt.
PAYBACK Punkte
0 °P sammeln!
This thesis was prepared between July 2007 and August 2011 at the Institute of Semiconductors and Microsystems (IHM) of the Technische Universität Dresden (TU Dresden) in cooperation with the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden. The scope of this work was UV-based nanoimprint lithography (UV-NIL). This alternative lithography technique can be applied to replicate polymer structures in a single patterning step with only minimal post-processing steps. The polymer patterns are then directly used as final device structures. The focus of this work was put on photonic w...