Nano scale pattern formation by ion beam irradiation techniques
Dipak Paramanik
Broschiertes Buch

Nano scale pattern formation by ion beam irradiation techniques

Nano scale pattern formation on semiconductor surfaces by ion beam irradiations

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With the fast growing interest in nanotechnology, fabrication of regular arrays of semiconductor nanostructures with controlled size and height is of great importance. These nanoscale pattern hold promise in applications as varied as optical devices, templates for liquid crystal orientation, and strain-free patterned substrates for hetero-epitaxial growth of quantum dots or wires. Fabrication of nano-dots through self-organization, induced by ion irradiation processes, has attracted special interest due to the possibility of production of regular arrays of dots on large areas in a single techn...