Microsystem Dynamics

Principles and Applications

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Discover a comprehensive look at the principles and applications of microsystem dynamics Microsystems or microelectromechanical systems (MEMS) are miniaturized devices with components measured in micrometers that perform micro- to nanometer scale electronic machine functions such as actuations. Since research and industrial production in recent decades has generated considerable knowledge of microsystem dynamics, there is an urgent need for a single guide which combines microsystem theory with practical applications to provide a general framework. Microsystem Dynamics fills this need, with the...