Microelectromechanical Systems Engineering
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Microelectromechanical systems (MEMS) represent the technology of microscopic devices comprising moving components, typically with dimensions ranging from 1 to 100 micrometers. These systems generally include a microprocessor and various microsensors. MEMS are developed using advanced semiconductor manufacturing techniques, such as wet and dry etching, molding and plating, and electro-discharge machining. Materials such as ceramics, metals, silicon, and polymers are frequently utilized in their production. Core development processes involve deposition, patterning, etching, and die preparation....
Microelectromechanical systems (MEMS) represent the technology of microscopic devices comprising moving components, typically with dimensions ranging from 1 to 100 micrometers. These systems generally include a microprocessor and various microsensors. MEMS are developed using advanced semiconductor manufacturing techniques, such as wet and dry etching, molding and plating, and electro-discharge machining. Materials such as ceramics, metals, silicon, and polymers are frequently utilized in their production. Core development processes involve deposition, patterning, etching, and die preparation. This book is a compilation of chapters that discuss the most vital concepts in the field of microelectromechanical systems engineering. It presents the complex subject in the most comprehensible and easy to understand language. Coherent flow of topics, student-friendly language and extensive use of examples make this book an invaluable source of knowledge.
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