Microelectromechanical Systems Engineering
Barkley Sparks
Gebundenes Buch

Microelectromechanical Systems Engineering

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Microelectromechanical systems (MEMS) represent the technology of microscopic devices comprising moving components, typically with dimensions ranging from 1 to 100 micrometers. These systems generally include a microprocessor and various microsensors. MEMS are developed using advanced semiconductor manufacturing techniques, such as wet and dry etching, molding and plating, and electro-discharge machining. Materials such as ceramics, metals, silicon, and polymers are frequently utilized in their production. Core development processes involve deposition, patterning, etching, and die preparation....