Microdischarge Arrays on Silicon
Mukesh Kumar Kulsreshath
Broschiertes Buch

Microdischarge Arrays on Silicon

Development and Study

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Microplasma is becoming a major topic within the plasma community. Microplasma comprise of Micro Hollow Cathode Discharges (MHCD), Microjets, and Dielectric Barrier Discharges (DBD). They can all work at atmospheric pressure and are non-equilibrium plasmas. Among these different types of microdischarges, MHCDs appear as a very promising device configuration to drive DC or AC current through different gases. In this particular reactor, the stable microplasma is confined inside a cavity. Although many configurations of MHCD arrangements have been proposed, but integrated systems involving MHCDs ...