Micro-Nano Technology XVII-XVIII - Proceedings of the 17th-18th Annual Conference and 6th-7th International Conference of the Chinese Society of Micro/Nano Technology
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Micro-Nano Technology XVII-XVIII - Proceedings of the 17th-18th Annual Conference and 6th-7th International Conference of the Chinese Society of Micro/Nano Technology

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This book collects selected papers from the 17th and 18th Annual Conference of the Chinese Society of Micro/Nano Technology (CSMNT2015 and CSMNT2016). The papers cover various fields, like Micro/Nano Transducer/Robot, Microfluidic Devices and Systems, Micro/Nano Fabrication & Measurement Technologies, Microfluidics and Nano Fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological/Nano Medicine, Packaging Technology. All the papers are written by Chinese researchers. From this book, you can have an overview of research of MEMS and nano technolog...