Micro-Nano Machining
Focused Ion Beam Milling
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The technological challenges have reached the micron and nano range. One technique to fabricate structures in this range is sputtering, particularly focused ion beam (FIB) milling. The need to understand significance of sputtering is based on the various applications of sputtering for structuring in technology. A great advantage of focused ion beam milling compared to other etch processes is the possibility to structure work materials which have a complex geometrical features. Moreover, the sputtering does not produce any thermal damage to the work material. The applications of FIB milling tha...
The technological challenges have reached the micron and nano range. One technique to fabricate structures in this range is sputtering, particularly focused ion beam (FIB) milling. The need to understand significance of sputtering is based on the various applications of sputtering for structuring in technology. A great advantage of focused ion beam milling compared to other etch processes is the possibility to structure work materials which have a complex geometrical features. Moreover, the sputtering does not produce any thermal damage to the work material. The applications of FIB milling that have yet to be realized are endless. The motivation to write a book in the area of FIB milling was gained by observing the superiority of FIB milling process over the other contemporary processes. The materials to be fabricated by FIB milling has never pose a limitation. Though the different materials have been fabricated by FIB milling, some materials still require intensive research fromthe machinability point of view. In this book, the focus has been made on the machinability aspects of the materials which are useful in fabrication of microtools, micro surgical manipulators, etc.
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