Micro- and Nano-Systems in 21st-Century
Designs, Developments, Applications and Perspective
Herausgegeben: Pachkawade, Vinayak; Guha, Koushik
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This book covers the principles, operation, and applications of the modern micro-nano devices being developed to address global twenty-first-century challenges. The subject of this book is Micro-Nano Systems in the twenty-first century. The major areas of applications cover medical diagnostics, 5G/6G communication, inertial, space, geography and resource exploration, defense, aviation, etc. This book provides the readers with a comprehensive outlook on the topics to help understand the physical scientific principles and techniques being applied to the design and development of devices, sensors...
This book covers the principles, operation, and applications of the modern micro-nano devices being developed to address global twenty-first-century challenges. The subject of this book is Micro-Nano Systems in the twenty-first century. The major areas of applications cover medical diagnostics, 5G/6G communication, inertial, space, geography and resource exploration, defense, aviation, etc. This book provides the readers with a comprehensive outlook on the topics to help understand the physical scientific principles and techniques being applied to the design and development of devices, sensors, and actuators using Micro-Nano System Technology (MST). The book addresses fabrication technologies such as CMOS-MEMS, Piezoelectric, and other special MEMS processes, where novel transducers are being designed and developed for ultrasound, energy harvesting, data storage, computing, inertial, fluidics, optomechanical, etc. The book serves as a tutorial guide to graduate students, researchers, engineers, other large technical audiences, and also the general public to understand these topics in a systematic and more thorough way by providing a range of illustrations, comparative charts/tables, equations, analysis, and plots/graphs. In a nutshell, the book is designed to provide a didactic approach to explaining scientific facts and figures in more lucid ways. The students will get the engineering and scientific know-how of modern micro and nano system technology, a range of transduction principles, and potential applied application areas. Readers will understand (through first-hand equations, principles of operations, solved examples, notes, several illustrations, and graphs) how to design, and develop a range of applications in microsystem technology.
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