Metal Impurities in Silicon- and Germanium-Based Technologies
Cor ClaeysEddy Simoen
Gebundenes Buch

Metal Impurities in Silicon- and Germanium-Based Technologies

Origin, Characterization, Control, and Device Impact

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This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an inte...