MEMS Accelerometer Modelling and Noise Analysis
Biter Bo a naltekin
Broschiertes Buch

MEMS Accelerometer Modelling and Noise Analysis

Modelling and Noise Analysis of Closed-Loop Capacitive Sigma-Delta MEMS Accelerometer

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Micro Electro Mechanical Systems (MEMS) have an extensive use in different areas of technology. Inertial sensors (accelerometers and gyroscopes) are one of the most widely used devices fabricated using MEMS technology. MEMS accelerometers play an important role in different application areas such as automotive, inertial navigation, guidance, industry, space applications etc. because of low cost, small size, low power, and high reliability. This book presents a detailed SIMULINK model for a conventional capacitive sigma-delta accelerometer system consisting of a MEMS accelerometer, closed-loop ...