Materials for Information Technology
Broschiertes Buch

Materials for Information Technology

Devices, Interconnects and Packaging

Herausgegeben: Zschech, Ehrenfried; Whelan, Caroline; Mikolajick, Thomas
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The fast-developing information technology industry is driving a need for new materials in order to facilitate the development of more reliable microelectronic products.Materials for Information Technology is an up-to-date overview of current developments and R&D activities in the field of materials used for information technology with a focus on future applications. Included are:materials for silicon-based semiconductor devices (including high-k gate dielectric materials);materials for nonvolatile memories;materials for on-chip interconnects and interlayer dielectrics (including silicides, ba...