Laser Interference Lithography for Micro- and Nano-Fabrication

Laser Interference Lithography for Micro- and Nano-Fabrication

Design and Development of a Prototype for Industrial End-Users

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There is an increasing interest in nanoscience and nanotechnology due to the new physics and chemistry that are accessible on the nanoscale and because of the large potential for new products and devices that they provide. Therefore, the ability to fabricate structures on the nanoscale with high precision and in a wide variety of materials is a crucial issue for the development of the nanoscience and nanotechnology. Lithography and the other processes associated with it are the core of the nanotechnology revolution. One of the most promising techniques for the fabrication of structures on the ...