IR blocking and transparent in visible and THz filters

IR blocking and transparent in visible and THz filters

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Here are presented the original results on the technology development of low-temperature synthesis (up to the room temperature) of AlN thin polycrystalline films with high thermal conductivity (Gamma = 140-180 W/m·K). The essential feature of proposed technological method is the combined use of the helicon sources of low-temperature plasma and elaborated the vacuum-arc sources, which allow the formation of multicomponent functional nanostructures. The technology developed provides good AlN films adhesion to flexible polymeric Teflon and Mylar substrates and are efficient infrared (IR) blockin...