Ions Induced Nanostructures in Si and GaAs

Ions Induced Nanostructures in Si and GaAs

From Surface Nanopatterning to Materials Modifications

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The Swift Heavy Ion irradiation induced surface nanostructuring and modifications of semiconducting materials and its devices are of significances both from fundamental as well as applied aspects and have not been either studied in details or related effects are yet to be fully understood.It has a direct relevance to simulate the degradation effects of electronic devices in space and in high radiation environment. The swift heavy ion in MeV range penetrates the semiconducting substrate quite deep in the bulk and hence a deep buried implantation layer can be worked out by swift heavy ion irradi...