Investigation on magnetron sputtered Pure and Doped WO3 films

Investigation on magnetron sputtered Pure and Doped WO3 films

For Electrochromic applications

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Deposition of tungsten oxide and molybdenum doped tungsten oxide films on glass, indium doped tin oxide coated glass and silicon substrates under different oxygen partial pressures, substrate bias voltages and substrate temperature by employing RF magnetron sputtering technique. The deposited films were systematically characterized by studying the chemical composition, chemical binding configuration, crystallographic structure and surface morphology and optical properties.The electrochromic and electrochemical properties of the pure and Mo doped WO3 films were studied by three electrode cell c...