Introduction to Microelectromechanical(MEM)Microwave Systems
Hector J de Los Santos
Gebundenes Buch

Introduction to Microelectromechanical(MEM)Microwave Systems

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Sharpen your understanding of microelectro-mechanical microwave systems with this comprehensive volume explaining the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book's unique presentation integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave considerations, and RF/microwave electronics.