Integrating Technology Simulation into Semiconductor Manufacturing
Rainer Minixhofer
Broschiertes Buch

Integrating Technology Simulation into Semiconductor Manufacturing

Bridging the Gap between TCAD and Semiconductor Manufacturing

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Semiconductor Industry is the maindriving force for technology innovation and "New Economy" markets. Theongoing development of faster integrated circuits with higher devicedensity has led to highly complex and sophisticated products whichare widely accepted by society. A modern integrated circuit cannotbe developed without the massive use of computer aided design (CAD)in any step of the complex flow from the idea to the final product. Thiswork concentrates on technology computer aided design (TCAD) and itsintegration into the semiconductor fabrication process flow. An analysis of the current s...