Integrated Front-end Analog Circuits for MEMS Sensors
Muhammad Qureshi
Broschiertes Buch

Integrated Front-end Analog Circuits for MEMS Sensors

-in Ultrasound Imaging and Optical Grating Based Microphone

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Micro-scaling makes MEMS sense capacitance small in a CMUT array element for intravascular ultrasound imaging. Smaller sensors lead to a lower active-to- parasitic ratio and thus, degrades sensitivity. Here capacitive feedback charge amplifier is shown as an alternative approach to resistive feedback amplifier. Capacitive feedback charge amplifier provides high sensitivity, small area, low distortion and power saving. This approach of charge amplifiers is also suitable in capacitive microphones where it provides low power and high sensitivity. In the case of biomimetic microphone structure, op...