Improving Reliability of Tungsten Plug Via on an Integrated Circuitry
Apek Mulay
Broschiertes Buch

Improving Reliability of Tungsten Plug Via on an Integrated Circuitry

Process Flow in BiCMOS and CMOS technology with Failure Analysis,Design of Experiments,Statistical Analysis & Wafer Maps

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The failure of an electronic circuitry with Aluminum metal process due to electromigration degradation has been a continuous process of research and development in semiconductor industry. With the advent of Internet of Things (IoT) revolution in global semiconductor industry, there is an expected huge demand for analog ICs for healthcare, automotive and other consumer electronic applications. Analog ICs make use of Aluminum metal process as most of the analog applications do not need a state-of-the-art technology. Aluminum is not only cost effective in use but also easy to use in processing as...