Hydrogenated carbon nitride by CH4/N2 DBD plasma and its application
Abhijit Majumdar
Broschiertes Buch

Hydrogenated carbon nitride by CH4/N2 DBD plasma and its application

CH4/N2 DBD plasma on thin film deposition and cell Biology

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The monograph is designed to illustrate the basics of dielectric barrier discharge plasma (DBD), deposition of hydrogenated carbon nitride (HCNx), its characterization and application toward biology. Chapter 1 deals with the dielectric barrier discharge apparatus and its basic functions. In chapter 2, the gas phase chemical reaction in CH4/N2 DBD plasma by quadrupole mass spectroscopy has been discussed. In Chapter 3, the variation of polarization (P) and the temperature ( T) at the electrode surfaces during the deposition of HCNx in CH4/N2 (1:2) DBD plasma has been considered. Chapter 4 deals...