Broschiertes Buch

High Power Impulse Magnetron Sputtering

Fundamentals, Technologies, Challenges and Applications

Herausgegeben: Lundin, Daniel; Minea, Tiberiu; Gudmundsson, Jon Tomas
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High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to gener...