
Handbook of Optical Metrology
Principles and Applications, Second Edition
Herausgeber: Yoshizawa, Toru
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Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive handbook discusses fundamental principles and techniques before exploring practical applications. Featuring contributions from veteran and up-and-coming researchers, the Second Edition offers ten new chapters-more than 200 pages-on surface roughness and micro-profiles, high-speed photography, fiber sensors and applications, microscopy, coordinate-measuring machines with optical and video probes, optical CT (computed tomography), industrial endoscopes and bore-scopes, measurement and inspection in the semiconductor and car industries, and optical methods of mechatronics.
Designed to provide beginners with an introduction to optical metrology without sacrificing rigor, this handbook discusses key principles and techniques before exploring practical applications. It explores everything from interferometry, holography, and Moiré metrology to diffraction, scattering, and polarization. This second edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.