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Fundamentals of Microfabrication: The Science of Miniaturization
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Table of contents:Lithography. Pattern Transfer with Dry Etching Techniques. Pattern Transfer with Additive Techniques. Wet Bulk Micromachining. Surface Micromachining. KIGA. Comparison of Micromachining Techniques. Micromachine Development and Packaging. Scaling Laws, Actuators, and Power in Miniaturization. Microfabrication Applications.Fundamentals of Microfabrication explores the science of miniaturization, including its methods and materials, from the historical to the state-of-the-art. The bestselling first edition met success not only with researchers and engineers, but also in advanced...
Table of contents:
Lithography. Pattern Transfer with Dry Etching Techniques. Pattern Transfer with Additive Techniques. Wet Bulk Micromachining. Surface Micromachining. KIGA. Comparison of Micromachining Techniques. Micromachine Development and Packaging. Scaling Laws, Actuators, and Power in Miniaturization. Microfabrication Applications.
Fundamentals of Microfabrication explores the science of miniaturization, including its methods and materials, from the historical to the state-of-the-art. The bestselling first edition met success not only with researchers and engineers, but also in advanced undergraduate and graduate classrooms around the world. The second edition has been extensively updated to include the most current information. The Applications section in particular has been expanded to provide more in-depth coverage of Bio-, RF-, High-temperature, and optical MEMS. Each chapter now contains a set of problems, and a solutions manual is available for qualifying course adoptions.
Lithography. Pattern Transfer with Dry Etching Techniques. Pattern Transfer with Additive Techniques. Wet Bulk Micromachining. Surface Micromachining. KIGA. Comparison of Micromachining Techniques. Micromachine Development and Packaging. Scaling Laws, Actuators, and Power in Miniaturization. Microfabrication Applications.
Fundamentals of Microfabrication explores the science of miniaturization, including its methods and materials, from the historical to the state-of-the-art. The bestselling first edition met success not only with researchers and engineers, but also in advanced undergraduate and graduate classrooms around the world. The second edition has been extensively updated to include the most current information. The Applications section in particular has been expanded to provide more in-depth coverage of Bio-, RF-, High-temperature, and optical MEMS. Each chapter now contains a set of problems, and a solutions manual is available for qualifying course adoptions.