Fiber-Optic Temperature Sensor Using a Thin-Film Fabry-Perot Interferometer
Glenn Beheim
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Fiber-Optic Temperature Sensor Using a Thin-Film Fabry-Perot Interferometer

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A fiber-optic temperature sensor was developed that is rugged, compact, stable, and can be inexpensively fabricated. This thin-film interferometric temperature sensor was shown to be capable of providing a +/- 2 C accuracy over the range of -55 to 275 C, throughout a 5000 hr operating life. A temperature-sensitive thin-film Fabry-Perot interferometer can be deposited directly onto the end of a multimode optical fiber. This batch-fabricatable sensor can be manufactured at a much lower cost than can a presently available sensor, which requires the mechanical attachment of a Fabry-Perot interfero...