Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems
Jeremy A. Raley
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Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems

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This thesis studies techniques for selective removal of semiconductor material in AlxGa1-xAs systems for the purpose of fabricating Micro-Opto-Electro-Mechanical Systems (MOEMS). Fabrication in AlxGa1-xAs allows for the emission, control, and detection of light from the near-infrared to the visible region of the spectrum. Specifically, MOEMS will enable wavelength division multiplexing (WDM) in the next generations of communications equipment, which will multiply the amount of information that can be sent through existing optical fiber cabling. This work was accomplished by performing an etch ...