Electron-Beam Interactions with Solids
Maurizio Dapor
Gebundenes Buch

Electron-Beam Interactions with Solids

Application of the Monte Carlo Method to Electron Scattering Problems

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The interaction of an electron beam with a solid target has been studied since the early part of the past century. Since 1960, the electron-solid interaction hasbecomethesubjectofanumberofinvestigators'workowingtoitsfun- mental role in scanning electron microscopy, in electron-probe microanalysis, in Auger electron spectroscopy, in electron-beam lithography and in radiation damage. The interaction of an electron beam with a solid target has often been investigated theoretically by using the Monte Carlo method, a nume- cal procedure involving random numbers that is able to solve mathematical pr...