Dynamics of Microelectromechanical Systems
Nicolae Lobontiu
Broschiertes Buch

Dynamics of Microelectromechanical Systems

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Dynamics of Microelectromechanical Systems is a systematic overview of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.Features of this work include:An in-depth treatment of problems that involve reliable modeling, analysis and design,Analytical models with correct dependences on service dimensions,Cantilever based systems for nanofabrication researchers and designers, andDynamics of complex spring and beam microsystems.This material contains n...