Anand Asundi
Gebundenes Buch

Digital Holography for MEMS and Microsystem Metrology

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Approaching the topic of digital holography from the practicalperspective of industrial inspection, Digital Holography forMEMS and Microsystem Metrology describes the process ofdigital holography and its growing applications for MEMScharacterization, residual stress measurement, design andevaluation, and device testing and inspection. Asundi also providesa thorough theoretical grounding that enables the reader tounderstand basic concepts and thus identify areas where thistechnique can be adopted. This combination of both practical andtheoretical approach will ensure the book s relevance and ap...