Developments in Surface Contamination and Cleaning, Volume 8
Gebundenes Buch

Developments in Surface Contamination and Cleaning, Volume 8

Cleaning Techniques

Herausgegeben: Kohli, Rajiv; Mittal, Kashmiri L.
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As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area.Several novel wet and d...