Design of Miniaturized RF MEMS Phase Shifter Using MEMS Switches
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The primary aim of this article is focused on developing high performance MEMS switches and design a 5-bit miniaturized phase shifter. One of the unique features of the proposed switch is a triangular shaped with improved characteristics such as low actuation voltage, high isolation, low insertion loss, low-stress factor, and good return loss. The MEMS switch is designed in a series configuration with coplanar waveguide (CPW) implementation. The design of novel triangular switch consists of the step by step characteristics of the rectangular, triangular and proposed triangular low voltage swit...
The primary aim of this article is focused on developing high performance MEMS switches and design a 5-bit miniaturized phase shifter. One of the unique features of the proposed switch is a triangular shaped with improved characteristics such as low actuation voltage, high isolation, low insertion loss, low-stress factor, and good return loss. The MEMS switch is designed in a series configuration with coplanar waveguide (CPW) implementation. The design of novel triangular switch consists of the step by step characteristics of the rectangular, triangular and proposed triangular low voltage switch for RF, mechanical, and the phase shifts are studied and compared.
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