Design of a Capacitive based Closed-Loop Displacement Sensor
Johan Schabbink
Broschiertes Buch

Design of a Capacitive based Closed-Loop Displacement Sensor

Conceptual design of a MEMS displacement sensor smaller than 1x1 mm with a resolution of 1 nanometer

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The starting concept is decomposed into system elements which have one function. For each system element a model is created that describes the behaviour of the element. Each system element model is than developed into a physical part of a MEMS system. During development the place on the structure and available space are closely monitored. Each part is designed for optimal resolution. The next step is to put all the physical MEMS parts together into a complete MEMS structure. With the MEMS structure defined, the last piece of the system can be designed. The controller is also the most essential...