Crystalline Silicon Surface Passivation by Amorphous Silicon Compounds
Roman Petres
Broschiertes Buch

Crystalline Silicon Surface Passivation by Amorphous Silicon Compounds

Modeling, experiments, solar cells and modules

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Solar cells based on crystalline silicon (c-Si) have the potential to make photovoltaic electricity cheaper than coal-based electric power generation within less than 10 years. The largest cost decrease potential on the cell level lies with improved electronic surface passivation. In this work, the current industry standard, amorphous silicon nitride (a-SiNx:H) deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD), is investigated and compared to amorphous silicon carbide, silicon carbonitride and silicon oxynitride films deposited by both high- and for the first time also low-frequen...