CMOS Based Behavioral Model of MEMS Accelerometer
Deepika Rana
Broschiertes Buch

CMOS Based Behavioral Model of MEMS Accelerometer

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The Micro-electro-mechanical system is the latest upcoming technology for the sensors integrating with the conventional microelectronics components and devices. The Complementary Metal Oxide Semiconductor is fabricated with latest lithography and other fabrication techniques. This research studied the accelerometer at micro level and its functionality. The Micro-electro-mechanical system based accelerometer exhaustive study carried, from the Capacitive type is taken into consideration. The capacitive type accelerometer is redesign and its behavioral model is designed using Complementary Metal ...