Chemical Vapor Deposition of Copper and Copper Oxides
Jorge Ramírez-Ortiz
Broschiertes Buch

Chemical Vapor Deposition of Copper and Copper Oxides

Selective deposition metallic copper on silicon wafer and copper oxides deposited on fiberglass

Versandkostenfrei!
Versandfertig in 6-10 Tagen
32,99 €
inkl. MwSt.
PAYBACK Punkte
16 °P sammeln!
Chemical vapor deposition (CVD) is a very versatile process widely used in the production of thin solid films and surface coating. It is also used to produce powders, fibers and monolithic components. In addition, the majority of chemical elements in the periodic table has been deposited, as well as compounds such as carbides, nitrides, oxides, intermetallic and many others. Chemical vapor deposition has been a critical technology in silicon microelectronics processes, fabrication of thin films of metals, semiconductors, and insulators. With increasing packing density in microelectronic device...