Annealed Nickel-Titanium Smart Alloy Thin Films

Annealed Nickel-Titanium Smart Alloy Thin Films

Formation of Different Phases in Annealed Nickel-Titanium Smart Alloy Thin Films

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The demand on NiTi thin film equipment is gradually increasing in a wide range in all the fieldssuch as biomedical, automotive, and aeronautic. NiTi SMA has now moved from the bulk form to the microscale and nano-scales.NiTi thin films embedded with its two peculiar characters that are shape memory property andpseudoelasticitywhich can give raise a huge power-to-weightratio in MEMS, results theamazing methods for activation. The present investigation focuses on study of the effectof annealing on sputtered deposited NiTi single bi-layered thin film. NiTi thin film has been fabricated using ac/d...