A Hand Book on Fabrication Aspects on MEMS based Pressure Sensors
A Technology of Sensing
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This book is designed as an introduction for the graduate students and researchers who want to understand the trends of MEMS materials and devices. Particularly, this book describes the experimental view of the fabrication of a thin membrane over a conical V-shaped cavity using front side lateral etching technology that proposes a novel front side etching fabrication process for silicon based piezoresistive micro- pressure sensor. As far as the fabrication process is concerned, this technique successfully accomplished a front side etching process laterally to replace the conventional back-side...
This book is designed as an introduction for the graduate students and researchers who want to understand the trends of MEMS materials and devices. Particularly, this book describes the experimental view of the fabrication of a thin membrane over a conical V-shaped cavity using front side lateral etching technology that proposes a novel front side etching fabrication process for silicon based piezoresistive micro- pressure sensor. As far as the fabrication process is concerned, this technique successfully accomplished a front side etching process laterally to replace the conventional back-side bulk micro-machining. This novel structure of micro pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. This book covers the principles, tools and methods for determining the reliability of micro-electro-mechanical (MEMS)materials, components and devices. Hopefully, this book will be very beneficial to the students of MEMS and NEMS courses.
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