Lucille A. Giannuzzi / Fred A. Stevie (eds.)

Introduction to Focused Ion Beams

Instrumentation, Theory, Techniques and Practice
Herausgegeben:Giannuzzi, Lucille A.; North Carolina State University

• Gebundenes Buch

Produktbeschreibung

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

Produktdetails

• Verlag: Springer / Springer US / Springer, Berlin
• Artikelnr. des Verlages: 978-0-387-23116-7
• 2005
• Seitenzahl: 376
• Erscheinungstermin: 19. November 2004
• Englisch
• Abmessung: 241mm x 160mm x 26mm
• Gewicht: 740g
• ISBN-13: 9780387231167
• ISBN-10: 0387231161
• Artikelnr.: 13743395

Autorenporträt

Lucille A. Giannuzzi, FEI Company, Hillsboro, OR, USA / Fred A. Stevie, North Carolina State University, Raleigh, NC, USA

Inhaltsangabe

The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.