Die ständig steigenden Anforderungen an die Mikroelektronik lassen sich zum Teil mit Hilfe von Vakuumtechnologien bewältigen: Im Vakuum kann man Bauelemente schneller, mit größerer Reinheit und zuverlässiger herstellen und zusammenfügen. Anwendungsgebiete reichen von der Herstellung integrierter Schaltkreise bis zu neuen Anzeigegeräten. Das erste Buch zu einem schnell wachsenden Forschungsgebiet!
Die ständig steigenden Anforderungen an die Mikroelektronik lassen sich zum Teil mit Hilfe von Vakuumtechnologien bewältigen: Im Vakuum kann man Bauelemente schneller, mit größerer Reinheit und zuverlässiger herstellen und zusammenfügen. Anwendungsgebiete reichen von der Herstellung integrierter Schaltkreise bis zu neuen Anzeigegeräten. Das erste Buch zu einem schnell wachsenden Forschungsgebiet!
WEI ZHU received his PhD in solid state science from Pennsylvania State University. He was a visiting assistant professor at North Carolina State University before he joined AT&T Bell Laboratories (later Lucent Technologies Bell Laboratories) in 1993. He is currently a member of technical staff in the Applied Materials Research Department at Agere Systems, formerly the microelectronics group of Lucent Technologies, where he specializes in carbon-based materials and applications. His interests include novel cold cathode materials and devices, nanoscale materials and technology, MEMS, and optical waveguide materials and devices. He holds more than thirty patents and has coauthored over forty papers. He organized the first Materials Research Society symposium on vacuum microelectronics in 1998. He is a member of the Materials Research Society and the Optical Society of America.
Inhaltsangabe
Preface. List of Contributors. 1. Historical Overview (Takao Utsumi). 1.1. Introduction. 1.2. Shoulders' Proposal. 1.3. Groundbreaking Work. 1.4. Invention of Spindt Cathode. 1.5. Field Emitter Arrays. 1.6. New Cathode Materials. 1.7. Future. Dedication. References. 2. Technological Overview (Gregory P. Kochanski, Wei Zhu, and Yehuda Goren). 2.1. Introduction. 2.2. Promise and Reality. 2.3. Case Studies. 2.4. Outlook. References. 3. Theory of Field Emission (Kevin L. Jensen). 3.1. Introduction. 3.2. One-Dimensional Tunneling Theory: Metals. 3.3. Emission from Multi-Dimensional Structures. 3.4. Conclusion. Acknowledgments. References. 4. Spindt Field Emitter Arrays (Charles A. (Capp) Spindt, Ivor Brodie, Christopher E. Holland, and Paul R. Schwoebel). 4.1. Introduction. 4.2. A Brief History of the Spindt Cathode. 4.3. Fabrication Technology. 4.4. Performance. 4.5. Applications and Ongoing Developments. 4.6. Summary. Acknowledgments. References. 5. Silicon Field Emitter Arrays (Jonathan Shaw and Junji Itoh). 5.1. Introduction. 5.2. Fabrication of Silicon FEAs. 5.3. Free Electron Theory of Field Emission. 5.4. Emission Characterization of Silicon FEAs. 5.5. Local Circuit Elements. 5.6. Summary. Dedication. References. 6. Novel Cold Cathode Materials (Wei Zhu, Peter K. Baumann, and Christopher A. Bower). 6.1. Introduction. 6.2. Diamond Emitters. 6.3. Carbon Nanotube Emitters. 6.4. Other Cold Cathodes. 6.5. Conclusion. References. 7. Field Emission Flat Panel Displays (Heinz H. Busta). 7.1. Introduction. 7.2. Field Emission Displays. 7.3. Other Display Technologies. 7.4. Summary. Institutions Involved in FED Commercialization. Acknowledgments. References. 8. Cold Cathode Microwave Devices (R. Allen Murphy and Mary Anne Kodis). 8.1. Introduction. 8.2. Microwave Amplifiers. 8.3. Field Emitter Arrays. 8.4. Characteristics of FEA-Cathode Microwave Tubes. 8.5. Future Work. References. Index.
Preface. List of Contributors. 1. Historical Overview (Takao Utsumi). 1.1. Introduction. 1.2. Shoulders' Proposal. 1.3. Groundbreaking Work. 1.4. Invention of Spindt Cathode. 1.5. Field Emitter Arrays. 1.6. New Cathode Materials. 1.7. Future. Dedication. References. 2. Technological Overview (Gregory P. Kochanski, Wei Zhu, and Yehuda Goren). 2.1. Introduction. 2.2. Promise and Reality. 2.3. Case Studies. 2.4. Outlook. References. 3. Theory of Field Emission (Kevin L. Jensen). 3.1. Introduction. 3.2. One-Dimensional Tunneling Theory: Metals. 3.3. Emission from Multi-Dimensional Structures. 3.4. Conclusion. Acknowledgments. References. 4. Spindt Field Emitter Arrays (Charles A. (Capp) Spindt, Ivor Brodie, Christopher E. Holland, and Paul R. Schwoebel). 4.1. Introduction. 4.2. A Brief History of the Spindt Cathode. 4.3. Fabrication Technology. 4.4. Performance. 4.5. Applications and Ongoing Developments. 4.6. Summary. Acknowledgments. References. 5. Silicon Field Emitter Arrays (Jonathan Shaw and Junji Itoh). 5.1. Introduction. 5.2. Fabrication of Silicon FEAs. 5.3. Free Electron Theory of Field Emission. 5.4. Emission Characterization of Silicon FEAs. 5.5. Local Circuit Elements. 5.6. Summary. Dedication. References. 6. Novel Cold Cathode Materials (Wei Zhu, Peter K. Baumann, and Christopher A. Bower). 6.1. Introduction. 6.2. Diamond Emitters. 6.3. Carbon Nanotube Emitters. 6.4. Other Cold Cathodes. 6.5. Conclusion. References. 7. Field Emission Flat Panel Displays (Heinz H. Busta). 7.1. Introduction. 7.2. Field Emission Displays. 7.3. Other Display Technologies. 7.4. Summary. Institutions Involved in FED Commercialization. Acknowledgments. References. 8. Cold Cathode Microwave Devices (R. Allen Murphy and Mary Anne Kodis). 8.1. Introduction. 8.2. Microwave Amplifiers. 8.3. Field Emitter Arrays. 8.4. Characteristics of FEA-Cathode Microwave Tubes. 8.5. Future Work. References. Index.
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