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The energy conversion, storage and distribution are the important concerns of our civilization in order to meet the challenges of global warming and finite nature of the fossil fuels. In response to the needs of the modern society and emerging technological advancements, it is now essential that new, low cost and environment friendly energy conversion and storage systems are to be developed. The development of solid-state batteries parallels the development of semiconductor electronics. Systematic and detailed investigations were made on the growth and characterization of Ni doped Lithium Cobaltate thin films considering the importance of these films as binder-free cathode layers in the fabrication of all solid state thin film microbattery. Pulsed laser deposition technique has been employed for the growth of Ni doped Lithium Cobaltate thin films. To improve the electrochemical properties these films the influence of nickel substitutions on Lithium Cobaltate host material has been studied. The studies on the characterization of these films are summarized and the conclusions drawn are presented in this book.