Julien Noel

Temperature Dependence of Actuated Membranes for RF MEMS Switches

Applications for thin film materials in a cryogenicenvironment

• Broschiertes Buch

Produktbeschreibung

Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied.

Produktdetails

• Verlag: VDM Verlag Dr. Müller
• Seitenzahl: 88
• Englisch
• Abmessung: 220mm
• ISBN-13: 9783639080636
• ISBN-10: 3639080637
• Artikelnr.: 25460055

Autorenporträt

Julien Noel received his BS (Electrical Engineering), MS and
Ph.D. degrees in 2001, 2004 and 2007 from Florida International
University, specializing in superconductivity,
RF engineering, MEMS, solid states devices and nanotechnology.
His current focus is on consulting early stages companies in the
semiconductor industry in Canada.