
A Comparative Study Humidity Sensors
Plasma Polymerized and Spin Coated Thin Film Sensors
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Recently, the great revolution is taking place in the field of smart electronic system for precise measurement various parameters. For development of smart system smart sensor is required. Therefore , the work on comparative study of spin coated, plasma treated and plasma polymerized based capacitive / resistive type humidity sensor is reported in this book. PolyMethyl Methacrylate (PMMA) is selected for the study the sensing properties.