This book starts with the basics of nanoindentation, the extraction process of mechanical properties from nanoindentation data and various load-displacement characteristics. Common errors for analysis of nanoindentation data are highlighted with suggested remedies. Material characterization techniques are explained in detail to explain the changes in material behaviour after indentation. Detailed nanoindentation studies with varying indentation cycles and peak loads using spherical indenter geometry are included. Mechanical properties variations and varying dislocation generation patterns are incorporated using different indenter geometries. Cathodoluminescence imaging and spectrum are used for the analysis of dislocation propagation patterns and band gap variations due to residual stresses generated during nanoindentation.