Insulator Charging in RF MEMS Capacitive Switches
Jay F. Kucko
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Insulator Charging in RF MEMS Capacitive Switches

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While capacitive radio frequency microelectromechanical (RF MEM) switches are poised to provide a low cost, low power alternative to current RF switch technologies, there are still reliability issues limiting switch lifetime. Previous research identified insulator charging as a primary cause of switch failure. Changes in switch pull-in and release voltages were measured to provide insight into the mechanisms responsible for charging and switch failure. A spatial and temporal dependent model was developed to describe silicon nitride's time-dependent charging as a function of applied bias. This ...